绝对式纳米时栅传感器栅尺污染误差分析与抑制方法研究

Analysis of grid-scale contamination error and suppression method for absolute time-grating sensor of grid-scale contamination error and suppression method for absolute time-grating sensor

针对服役状态下油污降低位移传感器精度和可靠性的问题,本文基于绝对式纳米时栅传感器,开展了栅尺油污污染误差分析与抑制方法研究。首先阐述了绝对式纳米时栅传感器测量原理;其次建立了栅尺油污污染的数学理论模型和电场仿真模型。通过理论和仿真分析表明:均匀油污污染对传感器没有影响,非均匀油污污染主要引入一次谐波误差,并且误差随着污染油污的厚度和宽度的增加而增加;最后搭建实验平台验证了以上理论分析的正确性。同时提出差动结构,有效抑制了一次谐波误差,提高了传感器抗污能力。研究油污造成的误差影响对提高传感器环境适应性有重要意义,同时也为提高传感器长期可靠性和增强环境适应性提供了理论基础。

To address the problem of oil pollution reducing the accuracy and reliability of displacement sensor under service condition,this article studies the oil pollution error analysis and suppression method of grid scale based on an absolute time-grating sensor.Firstly,the measuring principle of the absolute time-grating sensor is described.Secondly,the mathematical theory model and the electric field simulation model of grid-scale oil pollution are formulated.The theoretical and simulation analysis shows that the uniform oil pollution has no effect on the sensor,the non-uniform oil pollution mainly introduces the first harmonic error,and the error increases with the increase of the thickness and width of the oil pollution.Finally,an experimental platform is set up to verify the correctness of the above theoretical analysis.Meanwhile,the differential structure is proposed,which effectively inhibits the first harmonic error and improves the anti-fouling ability of the sensor.The study of the error effect caused by oil pollution is of great significance to improve the environmental adaptability of sensors and also provides a theoretical basis for improving the long-term reliability of sensors and enhancing environmental adaptability.