基于迈克耳孙等厚干涉的三自由度位移测量

Three-degree-of-freedom displacement measurement based on Michelson equal-thickness interference

提出了基于迈克耳孙等厚干涉的多自由度位移读取方法,可实时高精度测量目标反射镜3个自由度的运动,包括1个平动自由度和2个转动自由度.本文给出了干涉的测量原理、实验设计以及测试结果,验证了测量方案的可行性.通过与高精度商用运动平台标定测试,实现了三自由度运动测量,位移和角度灵敏度分别达到了1 nm/Hz 1/2@>1 mHz和10μrad/Hz^(1/2)@>1 mHz,动态范围分别超过了10 mm和100 mrad.这种测量方法可广泛应用于大学物理实验教学、微小位移计量以及工业精密制造等领域.

A multiple degree-of-freedom(DOF)displacement measurement method based on Michelson equal-thickness interference was proposed,which could realize the real-time,high-precision measurement for the movement of a target reflector in 3-DOF,where one was for translation and two for rotation.The measurement principle,experimental design,and test results of the interference were presented,verifying the feasibility of the measurement scheme.Through calibration tests with a high-precision commercial platform,a 3-DOF motion measurement was achieved.The displacement and angular sensitivities reached 1 nm/Hz^(1/2)@>1 mHz and 10μrad/Hz 1/2@>1 mHz,with dynamic ranges exceeding 10 mm and 100 mrad respectively.This measurement method could be widely applied in university physics experiment teaching,micro-displacement measurement,and industrial precision manufacturing.