离子束抛光仪的维护保养

Maintenance and upkeep of ion beam polisher

离子束抛光仪可以快速切割试样,无应力应变层,无外来污染物,暴露试样内部的真实结构信息。Leica EM TIC 3X型三离子束抛光仪是由3个离子源同时加工,具有离子束宽度大、面积大、非聚焦型离子源能量分散、对试样损伤小等优点。对该仪器的日常维护保养内容进行了总结归纳,并列举了若干常见问题及其解决方法,研究结果可为仪器使用者提供参考。

The ion beam polisher could quickly cut samples without stress-strain layers,foreign contaminants,and exposed the true internal structural information of the samples.The Leica EM TIC 3X three ion beam polisher was capable of processing three ion sources simultaneously,and had the advantages of large ion beam width,large area,non focused ion source energy dispersion,and minimal damage to the sample.The daily maintenance content of the instrument has been summarized,and several common problems and their solutions have been listed.The research results could provide reference for instrument users.