分段集成抽真空系统及工艺方法

Segmented Integrated Vacuum Pumping System and Process Method

通过对抽真空系统和工艺方法的研究分析,提出了分段集成抽真空系统及工艺方法,即将高中低真空管路、多种类真空机组和过程控制系统集成为一体的、批量化的抽真空系统。由计算机控制抽真空系统根据对工艺过程数据采集与工艺数据库的数据分析识别,自动对单体工件调控抽真空工艺程序。控制系统还可通过对工艺过程的数据统计分析,完善工艺数据库及工艺程序,进而对工艺过程自动识别调控,逐个提示工艺参数和提出异常处理建议,实现无人化智能抽真空作业管理。该系统及工艺方法能够降低设备的占有率,合理调配设备的运行和维护,提高设备利用率,降低能耗,提高生产率和工艺品质。

By studying and analyzing the vacuum pumping system and process methods,a segmented integrated vacuum pumping system and process method was proposed.A system that integrates high,medium,and low vacuum pipelines,various types of vacuum units,and process control systems to achieve batch vacuum pumping of products.The computer-controlled vacuum pumping system automatically regulates the vacuum pumping process program for individual workpiece based on data collection of the process and data analysis and identification of the process database.The control system can also improve the process database and process procedures through statistical analysis of process data,thereby automatically identifying and regulating the process,prompting process parameters one by one,and providing suggestions for abnormal handling,achieving unmanned intelligent vacuum operation management.This system and process method can reduce equipment occupancy,reasonably allocate equipment operation and maintenance,improve equipment utilization,reduce energy consumption,and improve productivity and process quality.