谐振式加速度计微组装显微视觉定位方法研究

Research on Microvisual Positioning Method of Resonant Accelerometer Microassembly

MEMS石英谐振式加速度计微组装装备是集多功能模块和关键技术于一体的自动化微装配系统,具备高精度和高效率特性,因此研制了一种应用于该系统的显微视觉定位方法。首先,依据微组装工艺分析,设计了具有上下双目显微视觉的精密定位结构。其次,基于九点标定原理,并于自主设计的高精度棋盘格标定板建立世界坐标系,实现了相机像素坐标系至世界坐标系的转换。最后,通过CIE色度图灰度重建以及Canny边缘检测算法,提出了加速度计装配特征的高精度识别方法。实验结果表明:系统显微视觉定位精度优于5μm,装配特征识别时长小于5 s。

MEMS quartz resonant accelerometer microassembly equipment is an automatic microassembly system integrating multi-function modules and key technologies,which has the characteristics of high precision and high efficiency.In this paper,a microscopic visual localization method applied to the system is developed.Firstly,according to the analysis of microassembly process,the precision positioning structure with upper and lower binocular microscopic vision is designed.Secondly,based on the nine-point calibration principle,the world coordinate system is established on the self-designed high-precision checkerboard calibration board.The conversion of camera pixel coordinate system to world coordinate system is realized.Finally,through CIE chromaticity map gray reconstruction and Canny edge detection algorithm,a high-precision recognition method of accelerometer assembly features is proposed.The experimental results show that the system’s microscopic visual positioning accuracy is better than 5μm,and the assembly feature recognition time is less than 5 s.