制绒槽溶质的浓度随槽体寿命变化趋势以及对反射率的影响分析

Analysis of Variation Trend of Concentration Changes with Texturing Bath Life and Its Effect on Reflectance

阐述实验使用金刚线硅片及制绒添加剂,在控制制绒稳定的腐蚀深度前提下,通过连续测试制绒槽在各个不同寿命时期溶质的溶度变化趋势及反射率的波动趋势,分析制绒槽各溶质的浓度随槽体寿命的变化趋势,以及反射率的波动情况。

This paper describes the experimental use of diamond wire silicon wafers and velvet additives. Under the premise of controlling the stable corrosion depth of velvet production, the solubility change trend of solutes and the fluctuation trend of reflectivity in different life periods of the velvet production tank are continuously tested. It analyzes the concentration change trend of various solutes in the velvet production tank with the life of the tank body, as well as the fluctuation of reflectivity.