工艺参数对磁控溅射制备Ag涂层微观性能的影响研究

Study on the Effects of Process Parameters on the Micro Properties of Ag Coatings Prepared by Magnetron Sputtering

采用正交试验法,探究磁控溅射工艺下的溅射温度、磁控靶功率、溅射时间对Ag涂层与基体结合性能与疏水性能的影响,研究总结出Ag沉积涂层形貌变化规律与最佳成形参数指标。采用能谱仪对正交试验参数下的涂层进行化学成分分析;采用扫描电镜(SEM)分析涂层微观形貌,推断涂层微观组织演变过程;采用划痕仪以及接触角测量仪进行涂层与基体结合强度表征与涂层疏水性能测试。结合以上测试,对正交试验结果进行极差分析,归纳汇总影响涂层性能指标因素的强弱排序与最佳的成形工艺参数。结果表明,各因素影响强弱排序为:Ag靶材溅射功率>溅射时间>溅射温度。标号为S1(Ag靶材溅射功率10 W,溅射时间10 min,溅射温度150℃)对应涂层的性能最优,涂层厚度控制在0.7~1.4μm最佳。研究结果可作为后续大批量工业生产关节假体工艺优选提供一定的参考依据与思路。

In this study, the orthogonal experimental method was employed to investigate the effects of magnetron sputtering processes such as sputtering temperature, magnetron target power and sputtering time on the adhesion performance and hydrophobic properties of Ag coatings prepared by magnetron sputtering. The morphological evolution of Ag deposited coatings and the optimal forming parameters were summarized. The chemical composition of the coatings under the orthogonal experimental parameters was analyzed using energy-dispersive spectroscopy(EDS). Scanning electron microscopy(SEM) was utilized to examine the micromorphology of the coatings and infer the evolution process of their microstructures. A scratch tester and contact angle measurement instrument were employed to characterize the adhesion strength between the coatings and the substrate as well as the hydrophobic performance of the coatings. Based on the above tests, a range analysis was performed on the orthogonal experimental results to summarize the ranking of the influencing factors on coating performance indicators and to determine the optimal forming process parameters. The results indicated that the strength of influence of the factors was ranked as follows: Ag target sputtering power> sputtering time > sputtering temperature. The coating corresponding to parameter set S1(Ag target sputtering power of 10 W, sputtering time of 10 min and sputtering temperature of 150 ℃) exhibited the best performance, with the optimal coating thickness controlled in the range of 0.7~1.4 μm. The findings of this study provided a reference and analytical framework for the optimization of large-scale industrial production of joint prosthesis processes in the future.