基于绝缘体上硅纳米线的布拉格相移光栅

Phase-Shifted Bragg Grating based on Silicon-on-Insulator Nanowire

基于金属互连的电子集成芯片串扰、延迟、散热以及功耗等问题日益凸显,已经难以满足日益增长的数据处理需求。光电集成技术作为下一代互连技术,随着其不断发展,业界对光电器件尺寸和性能的要求越来越高。【目的】为了能够兼顾布拉格相移光栅的器件大小和损耗,实现结构紧凑的相移光栅器件,文章提出了一种基于绝缘体上硅(SOI)纳米线的布拉格相移光栅。【方法】文章所提布拉格相移光栅是通过光刻技术在硅纳米线上制作周期性凹槽,构造光栅结构,从而降低光信号的传输损耗。为了验证文章所提布拉格相移光栅的性能,在入射波长范围为1400~1600 nm条件下,采用有限元法和时域有限元法对该器件的传输模式与传输特性进行了分析研究。此外,为了能够获得最佳的布拉格相移光栅结构参数,引入Q因子作为布拉格相移光栅结构优化设计的目标参数。【结果】研究结果表明,文章所提布拉格相移光栅在波长范围为1400~1600 nm条件下,具有优异的波长选择性能,并且几乎没有传输损耗;Q因子最大值为159时,该布拉格相移光栅性能最佳,光栅周期N为60。【结论】文章所提基于SOI纳米线布拉格相移光栅能够兼容传统半导体制备工艺,与基于表面等离激元布拉格相移光栅相比,在制造成本和光信号传输损耗方面具有较大的优势,能够广泛应用于密集波分复用、生物传感和滤波等领域。

Electronic integrated chips based on metal interconnections face increasing challenges,including crosstalk,delay,heat dissipation,and power consumption,making it difficult to meet the growing demand for data processing.Optoelectronic integration is considered to be the next generation interconnect technology.As this technology continuous to evolve,the industry's requirements for the size and performance of optoelectronic devices are becoming increasingly demanding.【Objective】To address the device size and loss of the Bragg phase shift grating,this paper proposes a Bragg phase shift grating based on Silicon-on-Insulator(SOI)nanowires.【Methods】By leveraging photolithography technology,periodic grooves are created on silicon nanowires to construct the grating structure,effectively reducing the transmission loss of optical signals.In order to verify the performance of the Bragg phase-shifted grating,the transmission modes and characteristics of the device are analyzed and studied using the finite element method and the finite-difference time-domain method under conditions with an incident wavelength range of 1400 to 1600 nm.Additionally,to obtain the best structural parameters of the Bragg phase-shift grating,the Q factor is introduced as the optimization target parameter.【Results】The results show that the Bragg phase shift grating has excellent wavelength selection performance in the wavelength range of 1400~1600 nm,and has a ultra-low transmission loss.Notably,when the maximum Q factor is 159,the Bragg phase shift grating achieves the best performance,with the grating period N of 60.【Conclusion】This grating offers significant advantages over surface plasmon-based Bragg phase shift gratings in terms of manufacturing cost and transmission loss of optical signal.As a result,it has wide applications in dense wavelength division multiplexing,biological sensing,filtering,and other related fields.