基于介质超表面的集成化偏振光传感器

Integrated Polarization Optical Sensor Based on Dielectric Metasurface

设计了一种基于介质超表面的集成化偏振光传感器,该传感器由介质超表面、双层视场光阑和互补金属氧化物半导体(CMOS)图像传感器等元件组成。首先,设计了用于将入射光正交分解为6种偏振光分量的介质超表面。其次,分析了传感器的光路结构,利用微纳工艺制作了用于消除环境杂光的双层视场光阑。然后,搭建了传感器对准平台,并在平台上完成传感器的制备。最后,对传感器进行标定与实验测试,标定后传感器的全Stokes参数测量误差为±0.15,偏振角误差为±0.3°。该传感器具有小体积、多方向、可测量全Stokes参数等优点。

In this study,we present the design of an integrated polarization optical sensor based on a dielectric metasurface.The sensor consists of a dielectric metasurface,double-layer field diaphragm,and complementary metal oxide semiconductor(CMOS)image sensor.We first design a dielectric metasurface to decompose incident light into six orthogonal polarized components.We next analyze the optical path structure of the sensor and fabricated a micro-nanoprocessed double-layer field diaphragm to eliminate ambient stray light.We then construct a sensor alignment platform and completed the preparation process for the sensor on this platform.Finally,we calibrate and test the sensor.Following calibration,the measurement error of the full Stokes parameter is±0.15,and the polarization angle error is±0.3°.The sensor has the advantages of being small in size and multi-directional as well as having the ability to measure all Stokes parameters.