非导电样品在X射线光电子能谱测试中的荷电效应问题及其改善方法

Problem and Improvement Methods of Charge Effect for Non-Conductive Samples in X-ray Photoelectron Spectroscopy Testing

非导电样品的荷电效应问题对X射线光电子能谱(XPS)的测试结果影响较大,往往会导致谱峰位移、畸变、展宽或强度衰减等现象.因此,有效降低非导电样品表面荷电积累,减少荷电效应对测试结果影响,是XPS工作者必须重视的问题.针对非导电样品在XPS测试中易产生荷电效应的问题,主要从样品选择与制备、荷电中和系统、电接触、光照方面着手研究,找出荷电效应原因,并提出改善方法.

The charge effect problem of non-conductive samples has a significant impact on X-ray photoelectron spectroscopy(XPS)test results,often leading to abnormal phenomena such as peak displacement,distortion,broadening,intensity attenuation,etc.Therefore,XPS researchers should pay attention to reducing the surface charge accumulation on non-conductive samples to minimise the charge effect on test results.Aiming at the charge effect problem that non-conductive samples easily generate during XPS testing,the causes were discussed based on the studies of sample selection and preparation,charge neutralization system,electrical contact,illumination.And the improvement methods of charge effect were proposed.