摘要
α-Ti3O5是TiOx材料中相对较稳定的晶型,是一种潜在的氧敏材料.与传统的TiO2、ZrO2材料相比,具有阻温特性好的优点.本文通过H2还原TiO2来制备α-Ti3O5薄膜,研究了不同还原温度和保温时间对薄膜晶相组成的影响以及薄膜的导电性、电阻-温度稳定性和在氧化气氛中的晶格稳定性.同时对α-Ti3O5薄膜的氧敏性能进行了初步研究.
The preparation and oxygen-sensing properties of α-Ti3O5 films were studied. The results of testing show that the Ti3O5 film with orthorhombic structure (α phase) can be obtained by reduction TiO2 thin films in H2 atmosphere. The α-Ti3O5 film is stable up to 650℃ in air. It has low resistance-temperature coefficient and certain oxygen-sensing properties, but its oxygen-sensing properties need further improvement.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2002年第6期1253-1257,共5页
Journal of Inorganic Materials
基金
国家基金委重大项目(59995520-6)
