基于压电驱动的纳米级精密定位系统的研究

Study on Precision Nanopositioning System Based on Piezo Actuator

利用压电陶瓷致动器作为驱动元件设计了X-Y两自由度精密定位工作台,并利用有限元分析法对机构进行了优化设计,采用电阻应变片作为微位移检测传感器,在此基础上设计了闭环控制器,该控制器包括压电陶瓷驱动单元、微位移传感器检测单元和中央处理单元,最后利用PID控制法进行了闭环控制实验研究。实验结果表明,本系统具有较好的控制品质和优异的动态性能,在对10μm×10μm两自由度工作台的控制中,闭环控制精度达10nm,阶跃响应的稳定时间小于8ms。

Based on piezo actuator,a precision XY stage has been designed by using the finite elements method.A closedloop controller,which used strain gauge as microdisplacement sensor has also been considered.The controller includes driveunit,collection unit deals with microdisplacement sensor,and core process unit.Experimentation has been carried out using PID control method.The result shows that the system has good control quality and dynamic response.The position accuracy achieves 10 nm while we control the XY stage with 10 μm×10 μm travel range.To a step response,system reaches stabilization within 8 ms.