基于双光栅结构的阴影莫尔法三维形貌测量

A Shadow Moire System Based on Two Ronchi Gratings Structure for the Measurement of 3D Profile

提出将双Ronchi光栅结构引入阴影莫尔法,用于物体三维形貌的测量。通过选择两光栅的夹角,得到不同周期的莫尔条纹,既可使仪器的量程与待测物体尺度相匹配,从而减小测量误差,适于进行高精度检测;又可在相位的1个周期内实现对物体的测量,避免了相位卷叠,易于实现自动测量。模拟实验结果表明,与绝对莫尔法相比,本方法可提高测量精度。

We report a shadow Moire system based on twiRonchigrating structure for the measurement of 3D profile of objects.By the selection of suitable angles included between the two Ronchi gratings,different periods of MOire fringes are obtained.Thus,the measurement ranges of the instrument can be a match for the scales of the objects to be measured,resulting in reduced value of error and high precision of the measurement.Besides,measurement can be carried out only in a single period of phase to avoid the curls of it,which makes a automatic measurement possible.The results of simulating experiments show that the measurement precision of this mathod can be improved comparing to the absolute Moire mathod.