摘要
本文介绍了CCD光电尺寸检测装置的原理,分析了光学系统中各部分的形式结构,设计了一套适合数字信号处理的单片机应用系统。并对通过实验得到的一些结论给予了详细的理论分析。最后就影响系统工作精度的几种主要误差进行了讨论。
The measuring principle of the photoelectronic dimensional detecting device which CCDs are being used is described. The form and structure of each part of optical system are determined. A set of applied system using singlepiece micro-computer is designed, and some conclusions from experiments are more detailly analysed in theory. In last, some main errors affecting device measuring degree of ac- curacy are discussed.
出处
《长春光学精密机械学院学报》
1992年第1期47-52,共6页
Journal of Changchun Institute of Optics and Fine Mechanics
关键词
CCD
光电尺寸检测
CCD
Photoelectric sise detecting