摘要
介绍了一种新型的颜色传感器,其分光采用染色的聚酰亚胺滤色膜,它与传统的硅集成工艺兼容;敏感器件采用三个硅光二极管阵列。该传感器对入射光波长在380nm~650nm的范围内具有较高的灵敏度,且温漂小。
A new colour sensor which is Compatible with silicon integrated technology is introduced. It employs colour filter film of dyeing polymide.The sensing element conslsts of an array of 3 silicon optical diodes.The device has higher sensitivity to incident light ranging from 380nm to 650nm in wavelength,and its temperature drift is low.
出处
《传感器技术》
CSCD
1992年第1期19-21,共3页
Journal of Transducer Technology
关键词
集成硅
颜色传感器
聚酰亚胺
Colour sensor Polymidc Colour filter film