气体传感器中的厚薄膜技术

Thick Film and Thin Film Techniques in Manufacturing Gas Sensors

厚薄膜技术已广泛用于制作气体传感器,在气敏技术中起重要作用。综述了在气体传感器制造中使用的厚薄膜技术,包括厚膜、薄膜、超微粒子薄膜和LB膜技术。

Thick film and thin film techniques play an important role in gas sensing techniques, which have been widely used in manufacturing the sensors. Thick film and thin film techniques used for gas sensors, including thick film technique, thin film technique,ultra-fine particles film and L-B film are described.