薄膜式电阻应变计

A Film Resistive Strainometer

采用高频溅射与光刻技术,制成了薄膜式电阻应变计并用计算机对所测数据进行了处理。结果表明:薄膜式电阻应变计的应变线性好、蠕变小、灵敏系数大、精度高、性能指标普遍优于一般的箔式应变计。

A method-by using RF sputtering and photoching technique tomake a film resistive strainometer is described, and the experimental data are dealed with computer. The result is showed that the property of making film resistive strainometer by this method is better than the one of general foil strainometer, it has following property: better linear.higher accuracy,bigger sensitivity and smaller deformation,