摘要
采用新颍的PIN结构研制的光电位置传感器,主要用于小型相机的自动对焦系统。文中阐述了PSD器件的工作原理以及为获得高反向击穿电压、高极间表面电阻和好的红外灵敏度在结构上和工艺上所作的改进。并对PSD器件进行了测试,得到符合设计要求的结果。
The Photoelectric position sensitiva device (PSD) with a novel PIN structure is mainly used in the auto-focusing system of miniature cameras, the operating principle and the distance-measuring method of the PSD devices are presented.Some improvements on structure and techniques were made in order to obtain high reverve breakdown voltage, high surface resistance between the two electrodes and high infrated sensitivity. The test results are consistent with those as requied.
出处
《传感器技术》
CSCD
1992年第4期21-25,共5页
Journal of Transducer Technology
关键词
相机
小型
对焦
传感器
光电位置
PIN structure Photoelectric position sensitive detector (PSD)