摘要
论述了适合于测量含(CH、CH_2、CH_3)基团薄膜厚度的红外传感器的设计原理、结构和参数选择。研究了时间差、充填物质、干涉条纹的影响。给出了克服这些影响的设计方法。
The design principle, structure and parameter selection of an infrared thickness sensor are expounded with the view of measuring the thickness of films containing (CH,CH2, CH8) groups. The influence of time difference, filling substance and interference fringes on it is also studied.The design method to overcome the influence was put forward
出处
《传感器技术》
CSCD
1992年第5期13-18,共6页
Journal of Transducer Technology
关键词
红外
厚度测量
传感器
Infrared Thickness measurement Precision
