摘要
针对目前具有三自由度X YθθZ变形特点的柔性机构缺少定量理论分析的情况,以基于直角柔性铰链的三自由度X YθθZ柔性机构为对象,提出了一种整体柔度公式的分析建模方法,推导出整体柔度矩阵中各柔度单元的闭环解析公式,并利用有限元和实验的方法对柔度公式进行校验。结果表明,有限元法和实验方法与闭环解析式结果基本一致。借助于闭环解析公式,分析了柔性铰链结构参数对机构柔度性能的影响关系。整体柔度公式为三自由度X YθθZ柔性机构的设计与分析提供了有效准确的理论方法,对柔性机构在微纳制造装备等工程中应用具有较大的实际意义。
A modeling method,using the compliance matrix,is proposed in this study to analyze the θXθYZ compliant mechanism consisting of leaf flexures.The closed-form equations are formulated for the compliance elements in the compliance matrix,which are validated by the finite element analysis(FEA) and experiments.Both FEA and experimental results coincide well with theoretical results.By analyzing the closed-form equations,the effects of geometric parameters on the compliant performance of the mechanism are investigated.The compliance matrix provides an effective and accurate method for the design and theoretical analysis of the θXθYZ compliant mechanism,which is of great significance for the practical application of compliant mechanisms in micro-/nano-fabrication equipment.
出处
《工程力学》
EI
CSCD
北大核心
2014年第8期204-208,222,共6页
Engineering Mechanics
基金
国家自然科学基金重点项目(91023047)
关键词
柔性机构
直角柔性铰链
柔度矩阵
柔度
有限元分析
compliant mechanism
leaf flexure
compliance matrix
compliance
finite element analysis
