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电子工业洁净室的洁净度关键影响因素及解决方案探讨 被引量:4

Discussion on Key Influencing Factors and Solutions for the Cleanliness of Clean Rooms in the Electronics Industry
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摘要 电子厂房洁净室作为一个庞大而复杂的系统,会导致其洁净度不合格的因素很多。为了保持洁净室洁净度水平,应定期进行洁净检测,并通过人员、设备和物品等制度建设管理,保障电子工业洁净室稳定生产。 As a huge and complicated system, the clean room of electronic factory building has many factors leading to unqualified cleanliness. In order to maintain the cleanliness level of the clean room, clean inspection should be carried out regularly, and the construction and management of personnel, equipment and articles should be carried out to ensure the stable production of the clean room in the electronics industry.
作者 章忠飞 翟传明 李晨 苏乃硕 田炳欢 闻义 谷悦 ZHANG Zhong-fei;ZHAI Chuan-ming;LI Chen;SU Nai-shuo;TIAN Bing-huan;WEN Yi;GU Yue(BOE Technology Group Co.,Ltd.;C+E Center for Engineering Research Test and Appraisal Co.,Ltd.)
出处 《智能建筑与智慧城市》 2019年第2期41-43,共3页 Intelligent Building & Smart City
关键词 电子洁净室 洁净度 影响因素 解决方案 electronics clean rooms cleanliness influencing factors solutions
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