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化学气相沉积制备Co-Re合金涂层的热力学分析

Thermodynamic analysis of chemical vapor deposition process for Co-Re alloy coating
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摘要 Co-Re合金涂层是一极具潜力的抗高温烧蚀材料。利用HSC Chemistry 6.0软件对化学气相沉积Co-Re合金涂层进行模拟计算。分析结果表明,选择H_2-Re_2(CO)_(10)和H_2-Co(acac)_2为反应体系,在0~1 000℃的温度范围内ΔG均小于零;反应产物Re和Co含量随沉积温度的升高而增加,但沉积过程中会有C单质产生;制备Co-Re合金涂层的最佳反应温度区间为400~600℃。 Co-Re alloy coating is a potential high temperature ablative material. In this paper, HSC Chemistry 6.0 software was used to simulate the chemical vapor deposition of Co-Re alloy coating. The results show that within the temperature range of 0-1 000 ℃, the ΔG was less than zero when selected H2-Re2(CO)10 and H2-Co(acac)2 as reaction system. And, the content of Re and Co increased with the increase of deposition temperature. However, during the deposition process, C simple would produce. The optimum reaction temperature range for the preparation of Co-Re alloy coatings was 400-600 ℃.
作者 敬瑀 龚伟 王恩泽 JING Yu;GONG Wei;WANG Enze(Shool of Materials Science and Engineering,Southwest University of Science and Technology,Mianyang 621010,China;Shool of Manufacturing Science and Engineering,Southwest University of Science and Technology,Mianyang 621010,China)
出处 《功能材料》 EI CAS CSCD 北大核心 2019年第3期3170-3173,3178,共5页 Journal of Functional Materials
基金 四川省应用基础重点资助项目(2017JY0084) 四川省教育厅科研创新团队资助项目(7TD0042)
关键词 Co-Re合金涂层 化学气相沉积 热力学 模拟计算 Co-Re alloy coating chemical vapor deposition thermodynamic simulate computation
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