G11大尺寸显示面板线超长高性能钼靶材轧制工艺改进研究

Optimization of rolling process for super length and high performance molybdenum targets applied on G11 of large size display panels

G11钼靶材的长度达到3430mm,属于超长靶材,之前国际上未有成熟工艺和技术可借鉴,具有较高的生产难度。洛阳高新四丰电子材料有限公司在已有技术基础上,对生产设备及技术工艺的配套改进和提升,成功研制G11超长高性能钼溅射靶材并实现产业化,填补国内外技术空白,满足了我国当前超高世代产线建设规模日益增长的市场需求。本文重点介绍G11钼靶的轧制工艺改进试验及性能研究取得的成果。

The length of G11 molybdenum target reaches 3430 mm,there is no mature production technology and technology available in the world and it is difficult to produce that super-long target.Depending on the existing mature technology,Luoyang Sifon Electronic Materials co.,LTD has successfully developed high performance G11 molybdenum sputtering target by improving production craft and technology,and realized industrialization,filling a domestic gap in this field.The products meet an expanding demand in market of China with the development of high-generation display panel production line.This paper focuses on the rolling process improvement of G11 molybdenum target,and the experimental results are investigated.