利用加热器辐射热控制磷源温度合成InP的热场分析

Analysis of Thermal Field on Synthesis of InP by Radiant Heat of a Heater to Control Phosphorus Temperature

对利用加热器的辐射热在高压单晶炉内合成InP的热场设计作了分析,并给出了实验结果。

The thermal field design is analysed on synthesis of InP formed by the radiant heat of a heater to control phosphorus Temperature and the results of experiment are given as well.