摘要
温度是影响微机械加速度计性能指标、限制其应用领域的关键因素之一。在简要介绍微机械加速度计发展现状及温度对其影响机理的基础上,对近年来在降低微机械加速度计温漂方面国内外研究机构所采取的主要研究方法进行了详细的阐述,为该研究领域的推进提供了参考。
Temperature is one of the key factors that affect the performance index and limit the application of micro-mechanical accelerometer.In this paper,the research of MEMS accelerometers was introduced and the influence mechanism of the temperature on MEMS accelerometers was analyzed briefly.Several main research methods reported by research institutions in recent years on how to reduce the temperature drift of MEMS accelerometer were elaborated in detail.These works could provide a reference for advancing the research field.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2015年第6期565-571,共7页
Research & Progress of SSE
基金
陕西省教育厅专项科研计划项目(15JK1683)
关键词
微电子机械系统
加速度计
温漂
micro-electro mechanical system(MEMS)
accelerometer
temperature drift
