摘要
本文介绍了液湘外延系统设备的密封可靠性与真空度对外延片质量的影响。按要求设计、制作了操作方便、真空度高、密封性好、全硬接液相外延设备。
In this paper, encapsulation reliability of LPE system and vacuum effects on wafers are reported. Fabrication of high quality all-metasl-connected LPE equipment is also described.
出处
《光通信研究》
1987年第2期50-53,38,共5页
Study on Optical Communications
