基于氢原子碰撞辐射模型的发射光谱法诊断电子密度

Electron Density Diagnosisby Optical Emission Spectroscopy Basedonthe Hydrogen Atom Collisional Radiative Model

基于碰撞辐射模型,利用氢原子的巴尔末线比对HUST射频负氢离子源等离子体电子密度进行诊断。首先针对HUST离子源等离子体的放电条件,建立了综合考虑氢原子直接激发和氢分子解离激发机制的碰撞辐射模型。基于建立的模型,利用氢原子的巴尔末线比来诊断电子密度。进一步分析了不同的氢原子分子密度比对电子密度诊断的影响,结果表明当电子温度较高,氢分子的解离度较低的等离子体放电状态下,必须同时考虑氢原子直接激发和氢分子解离激发对激发态氢原子的贡献。

In this paper,the intensity ratio of hydrogen atom Balmer lines was used to determine electron density based on a collisional radiative model.Firstly,a collisional radiative model of hydrogen atom considering both the direct excitation of hydrogen atom and the dissociation excitation of hydrogen molecule was established for HUST radio frequency negative hydrogen ion source plasmas.Based on the model,the intensity ratio of hydrogen atom Balmer lines was used to determine electron density.Moreover,the influence of density ratio of hydrogen atom and the molecular on the diagnosis of electron density was analyzed,which showed that it was necessary to take into account both the direct excitation channel and the dissociation excitation channel when the electron temperature was high or the degree of hydrogen molecule dissociation was low in plasmas.