基于电涡流位移传感器的微间隙测量系统研究

Research on micro-gap measurement system based on eddy current displacement sensor

为了研究电涡流位移传感器有效检测距离与待测金属导体横截面积两者之间的关系,在介绍电涡流位移传感器工作原理的基础上,搭建了一种微间隙动态测量系统。采用了基于最小二乘法的曲线拟合分析法对实验数据进行研究。实验结果表明,当传感器探头型号确定时,电涡流传感器的有效检测距离将会随着待测金属导体横截面积的减小而减小,测量结果的准确度下降。搭建的这种微间隙测量系统与研究结果对于电涡流位移传感器的实际应用具有一定的参考意义。

In order to research the relationship between the effective detection distance of the eddy current sensor and the cross-sectional area of the metal conductor to be measured,based on the working principle of the eddy current displacement sensor,a micro-gap dynamic measurement system is established,and experiments on micro-gap dynamic measurement of objects are carried out.Curve fitting based on least square method was used to fit experimental data.The experimental results show that when the probe type is determined,the effective detection distance of the eddy current sensor will decrease with the decrease of the area of the metal conductor to be measured.The measurement system and the research results have certain reference significance for the practical application of eddy current displacement sensor.