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方形工件环形抛光中倾覆力矩对面形的影响

Influence of Overturning Moment to Square Workpiece Surface Figure in Continuous Polishing
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摘要 研究了高重心小抛光面的方形工件(抛光面大小30 mm×30 mm,高90 mm)环形抛光中,倾覆力矩对工件面形的影响。通过分析方形工件在工件孔中的运动轨迹及受力情况,发现了工件与工件孔壁碰撞会导致工件倾斜,高重心的工件在碰撞时倾斜幅度较大,倾斜角度和工件与工件孔壁间的间隙有关。重心较高的方形工件,以及工件与工件孔壁间隙的增大都会增加由倾覆力矩导致的面形变凸与畸变。在高重心小抛光面的方形工件侧面粘接玻璃靠体后,工件的重心降低,工件孔与工件间的间隙减小,成功解决了面形变凸与畸变的问题,面形PV达到0.056λ,PV-|POWER|达到0.054λ,满足了生产需求。 In this paper,the effect of overturning moment on the square workpiece with high center of gravity and small polishing surface in annular polishing is studied.By analyzing the movement track and stress of square workpiece in workpiece hole,it is found that the collision between workpiece and the wall of workpiece hole will lead to workpiece inclination.The inclination of high-gravity workpiece is larger when collision occurs,and the inclination angle is related to the size of the space between workpiece and workpiece hole wall.After the side of square workpiece with high center of gravity and small polishing surface is bonded to glass body,the center of gravity of workpiece decreases,the size of space between workpiece hole and workpiece decreases,and the problem of surface deformation convexity and distortion is successfully solved.The surface shape PV reaches 0.56λ,and the PV-|POWER|reaches 0.54λ,which meets the production demand.
作者 张铉 熊长新 陈光 钟林 ZHANG Xuan;XIONG Chang-xin;CHEN Guang;ZHONG Lin(Huazhong Institute of Electro-Optics-Wuhan National Laboratory for Optoelectronics,Wuhan 430223,China)
出处 《光学与光电技术》 2019年第2期79-84,共6页 Optics & Optoelectronic Technology
关键词 倾覆力矩 环形抛光 方形工件 面形 沥青盘 overturning moment continuous polishing square workpieces surface profile pitch lap
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