摘要
A method is presented for in situ resolution calibration of multiple feedback interferometers(MFIs) using two lasers with di?erent feedback levels simultaneously. The laser with weak optical feedback level generates half-wavelength optical fringes, whereas the laser with strong multiple feedback level generates optical nanofringes. By using this method, the number of displaced optical nano-fringes can be easily counted, and the resolution of the MFIs can be accurately determined. The integrated MFIs can be used to measure displacements and calibrate other displacement sensors.
A method is presented for in situ resolution calibration of multiple feedback interferometers(MFIs) using two lasers with di?erent feedback levels simultaneously. The laser with weak optical feedback level generates half-wavelength optical fringes, whereas the laser with strong multiple feedback level generates optical nanofringes. By using this method, the number of displaced optical nano-fringes can be easily counted, and the resolution of the MFIs can be accurately determined. The integrated MFIs can be used to measure displacements and calibrate other displacement sensors.
基金
supported by the Key Project of the National Natural Science Foundation of China(Nos.51375262,60827006,and 60723004)
the Scientific and Technological Achievements,Transformation and Industrialization project by the Beijing Municipal Education Commission,and the Scholarship Award for Excellent Doctoral Students granted by the Ministry of Education
