摘要
We present a high-sensitivity fiber Bragg grating(FBG)-based microphone with a flat response and static pressure equalization. A very high dynamic sensitivity of the microphone is achieved by a pressure sensing structure based on a carbon fiber diaphragm. Static pressure equalization is realized by a balance structure with a capillary glass tube. The resonances of the sensor are suppressed by air damping structures, and a broadened flat response is achieved. An acoustic-solid interaction model was used to analyze the response characteristics of the microphone. An experimental prototype was produced and tested, and the results are well consistent with the design.The tested sensitivity was-10 d B re 1 pm/Pa from 10 Hz to 2.5 kHz with a fluctuation of less than ±1.5 dB.Combined with the phase-generated-carrier-based coherent detection scheme, the microphone can achieve a sound resolution of the milli-pascal level. The static pressure sensitivity is measured to be-0.27 pm/atm, which is 100 dB lower than the dynamic sensitivity.
We present a high-sensitivity fiber Bragg grating(FBG)-based microphone with a flat response and static pressure equalization. A very high dynamic sensitivity of the microphone is achieved by a pressure sensing structure based on a carbon fiber diaphragm. Static pressure equalization is realized by a balance structure with a capillary glass tube. The resonances of the sensor are suppressed by air damping structures, and a broadened flat response is achieved. An acoustic-solid interaction model was used to analyze the response characteristics of the microphone. An experimental prototype was produced and tested, and the results are well consistent with the design.The tested sensitivity was-10 d B re 1 pm/Pa from 10 Hz to 2.5 kHz with a fluctuation of less than ±1.5 dB.Combined with the phase-generated-carrier-based coherent detection scheme, the microphone can achieve a sound resolution of the milli-pascal level. The static pressure sensitivity is measured to be-0.27 pm/atm, which is 100 dB lower than the dynamic sensitivity.
作者
Faxiang Zhang
Chang Wang
Xiaolei Zhang
Shaodong Jiang
Jiasheng Ni
Gangding Peng
张发祥;王昌;张晓磊;姜劭栋;倪家升;彭纲定(Shandong Key Laboratory of Optical Fiber Sensing Technologies, Laser Institute, Qilu University of Technology(Shandong Academy of Sciences);College of Precision Instrument and Opto-Electronics Engineering and Key Laboratory of Opto-Electronics Information and Technical Science, Ministry of Education, Tianjin University;School of Electrical Engineering and Telecommunications, The University of New South Wales)
基金
supported by the National Natural Science Foundation of China(No.61605102)
the Shandong Youth Taishan Scholar Program
the Key Research and Development Program of Shandong Province(Nos.2018GGX101042 and 2018GSF120008)
