1FEIGE V K S, BALK I.J. Calibration of a scan- ning probe microscope by the use of an interference- holographic position measurement system [J] Meas. Sci. Tech. , 2003, 14:1032-1039.
2HIETA T, MERIMAA M, VAINIO M, et al: High-precision diode-laser-based temperature measurement for air refractive index compensation [J]. Appl. Opt. ,2011,50(31):5990-5998.
3DOROZHOVETS N V, HAUSOTTE T, MAN- SKE E, et al: Novel control scheme for a high- speed metrological scanning probe microscope [J].Meas. Sci. Technol. , 2011, 22: 094012.