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基于主成分分析法的离轴三反系统装调及其应用 被引量:6

Off-Axis Three-Mirror Anastigmatic System Alignment and Application Based on Principal Component Analysis
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摘要 提出一种基于主成分分析法的装调方案;对理想的离轴三反系统的灵敏度矩阵进行处理,以获得系统失调量对残余像差敏感度的权重值,通过去除敏感度低的调整量来制定合理的装调方案;基于逆向优化法的计算机辅助装调技术原理,进行模拟装调及装调方案的验证。结果表明:采用所制定的装调方案可使装调精度达到10^(-7)量级,调整量从11个减少到6个,装调难度降低,光机结构的稳定性得到提高。 An alignment scheme based on the principal component analysis is proposed.The sensitivity matrix of ideal off-axis three-mirror anastigmatic system is processed to obtain weights of system misalignment to residual aberration sensitivity.The reasonable alignment scheme is formulated by removing adjustments with low sensitivities.Based on the principle of computer aided alignment technology of the reverse optimization method,the simulation alignment and the alignment scheme are verified.The results show that with the proposed alignment scheme,the alignment accuracy is up to 10-7 magnitude,and the adjustment amount is reduced from 11 to 6.The alignment difficulty is reduced,and the stability of optical and mechanical structure is improved.
作者 郭继锴 王治乐 陆敏 Guo Jikai;Wang Zhile;Lu Min(ResearchCenterforSpaceOpticalEngineering,School of Astronautics,Harbin Institute of Technology,Harbin,Heilongjiang 150001,China)
出处 《光学学报》 EI CAS CSCD 北大核心 2019年第3期341-347,共7页 Acta Optica Sinica
基金 航空科学基金(20160177007)
关键词 光学设计 计算机辅助装调 主成分分析法 离轴三反系统 逆向优化法 optical design computer aided alignment principal component analysis off-axis three-mirror anastigmatic system reverse optimization
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  • 1刘新文,王惠南,钱志余.小波变换对OCT图像的降噪处理[J].光子学报,2006,35(6):935-939. 被引量:30
  • 2薛栋林,郑立功,王淑平,张学军.离轴二次非球面补偿检验计算机辅助调整技术研究[J].光学精密工程,2006,14(3):380-385. 被引量:10
  • 3EGDALL I M. Manufacture of a three-mirror widefield optical system [J]. Opt. Eng. , 1985,24 (2) : 285- 289.
  • 4FIGOSKI J W, SHRODE T E, MOORE G F. Computer-aided alignment of a wide-field three-mirror, unobscured, high-resolution [J]. SPIE, 1989, 1049: 166-177.
  • 5DESCOUR M R, WILIER M R, CLARKE D S, et al. EUVL projection-camera alignment methods [J].SPIE, 1999,3676:663-668.
  • 6WlLLERT M R,DESCOUR M R. Optimization of metrology measurements in extreme ultraviolet projection cameras : University of Arizona Lithography Package v SPIE, 1999,3780 :73-82.
  • 7HOU Xi,WU Fan,YANG Li,et al. Comparison of annular wavefront interpretation with Zernike circle polynomials and annular polynomials [J]. Applied Optics, 2006,45 (35) : 8893-8901.
  • 8HOWARD J M. Optical modeling activities for NASA ' s James webb gpace telescope (JWST) : IV. overview and introduction of MATLAB based toolkits used to interface with optical design software [J]. SPIE, 2007, 6688: 666804-1-666804- 10.
  • 9[1]IRA M. EGDAL L. Manufacture of a three-mirror wide-field optical system[J]. Optical Engineering ,1985,24(2):285-292.
  • 10[2]WU N, ELLERBROEK B L, WILLIAMS S G. Experimental verifications of an image-based alignment technique for optical systems in space[J]. SPIE, 1987, 351:121-130.

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