Dy和Er掺杂对AlN陶瓷显微结构及性能的影响

Property and Microstructure of Alumina Nitride Ceramics Doped with Dy and Er

在AlN粉末中添加稀土氧化物Dy2O3和Er2O3,采用高温烧结方法制备氮化铝陶瓷,研究了稀土掺杂对陶瓷烧结性能、显微结构及导热性能的影响。结果表明:纯氮化铝陶瓷相对密度只有90.7%,导热率为45.7W/(m·K),而添加3%的Dy2O3的AlN陶瓷相对密度为99.4%%,导热率为84.1W/(m·K),添加3%的Er2O3可使氮化铝陶瓷相对密度提高到99.1%,导热率达到115.4W/(m·k);添加Er2O3可有利于消除氮化铝陶瓷的晶界相,减少氮化铝晶粒缺陷及提高声子在晶体中的传播路程,并显著提高氮化铝陶瓷的结构致密性和导热性能。

The Dy2O3 or Er2O3doped AlN ceramics were fabricated at a flowing nitrogen atmosphere by a high temperature sintering process.The effect of the rare earth oxide additive on the sintering,thermal behavior and microstructure of AlN ceramics were investigated,the relative density of pure AlN ceramics is 90.7%,and the thermal conductivity is 45.7W/(m·K),however,AlN ceramics with the 3% Dy2O3 additive exhibit a relative density of 99.4%and the thermal conductivity of 84.1W/(m·K),and AlN ceramics with the 3% Er2O3 additive exhibit a relative density of 99.1%and the thermal conductivity of 115.4W/(m·K).This dopant also has a positive effect on the elimination of grain boundary and the decrease of the defect density in the alumina nitride matrix due to the increase of the propagation of phonons,indicating that the rare earth oxide additives improve the sintering process,microstructure feature and thermal behavior of AlN ceramics.