新型傅里叶变换光谱仪信号采集系统光学设计及仿真

Optical Design and Simulation in Signal Acquisition System of a Novel Fourier Transform Spectrometer

将基于微光机电系统的微镜阵列与倾斜反射镜相结合,构建应用于中红外波段的微型化便携式傅里叶变换光谱仪.在阐述了该光谱仪工作原理的基础上,通过对微镜衍射特性分析,提出了信号采集系统光路设计要求,并结合ZEMAX软件进行了光学设计与仿真,结果表明:在2.5~3.5μm波长范围内,保证微镜选通列与非选通列间反射光互不干扰的情况下,本文所设计的信号采集系统可将80%以上的干涉信号会聚到5mm×5mm的单点探测器中.

Combining micro-mirror based on micro-opto-electro-mechanical system and tilting mirror,a novel micro-Fourier transform spectrometer was presented that could be applied in the mid-infrared wavelengths.The working principle of this spectrometer was introduced and then the optical path design required by the signal acquisition system was raised by analyzing diffraction characteristics of the micromirror.The optical design and its simulation were conducted with ZEMAX.The results show that within the spectral range of 2.5μm and 3.5μm,more than 80% of the interference signals can focus in the single detector with the area of 5mm×5mm in ensuring the reflected light between on-state and off-state of micro-mirror without interfering.