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Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides 被引量:1

Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides
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摘要 We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach–Zehnder interferometers, enabling permanent correction of typical fabrication-based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control. We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach–Zehnder interferometers, enabling permanent correction of typical fabrication-based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.
出处 《Photonics Research》 SCIE EI 2017年第6期97-101,共5页 光子学研究(英文版)
基金 Engineering and Physical Sciences Research Council(EPSRC)(EP/L00044X/1,EP/M022757/1) Wolfson Foundation Royal Society
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