大气状态下SPM纳米加工系统的开发

Development of SPM Nanofabrication System in Air

对现有的商业化 SPM进行了一些必要的改造 ,使其适合于扫描探针加工的要求。讨论了在 DI公司多功能 SPM基础上开发纳米加工系统的可能性 ,并提供了一套完整的信号施加、过程监测和环境控制的方法 ,实现了矢量式的纳米氧化加工 ,得到了 30 nm宽的氧化结构 。

Nanofabrication by scanning probe microscope (SPM) is a promising fabrication approach, and it can produce functional nanodevices and nanoscale mechanical structures.Some necessary improvements are completed to make the commercial SPM suitable to the nanofabrication process. This paper shows the possibility of developing a nanofabrication system on the basis of our Multimode SPM.A set of methods are provided,including signal application, process monitor and environment control to realize the nanoscale fabrication in vector style. We can fabricate 30nm wide nanostructures to support our further study on the nanoscale electronic devices.