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提高微压传感器灵敏度的深盆腔压力膜片研究(二)

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出处 《仪表技术与传感器》 CSCD 北大核心 2002年第12期1-2,共2页 Instrument Technique and Sensor
基金 国家 973项目"集成微光机电系统研究"(G1 9990 331 0 1 )的资助
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参考文献7

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  • 3SCHEPER P R, OLTHUIS W, BERGVELD P. The design, fabrication, and testing of corrugated silicon nitride diaphragm. J. of Microelectromechanical Systems, 1993, 3 (1): 36-42.
  • 4ZOU Y M, Y1 Q. Finite-element analysis of silicon condenser microphones with corrugated diaphragms, Finite Elements in Analysis &Design, 1998, 30(1 '2): 163-173.
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