摘要
利用电弧离子镀设备 ,沉积了不同C、N比的Ti(CxN1 -x)薄膜 ,研究了C含量对Ti(CxN1 -x)薄膜的结构 (相结构、择优取向及晶格常数 )及力学性能 (硬度、膜基结合强度及抗磨损性能 )的影响。结果表明 ,复合镀层的C、N比随CH4、H2 流量之比而变化 ,但原子百分数之和基本不变 (约 4 6.5% )。复合镀层结构致密 ,与基体结合良好 ,抗磨和切削性能优于TiC和TiN镀层。
Ti(C-xN-{1-x}) plating with different ratio of C and N was deposited by using electric arc ion plating apparatus. The effect of C content on the structure and mechanical properties of Ti(C-xN-{1-x}) coating was studied. Results showed that antiwear and cutting characteristic of composite coating was more excellent than TiC and TiN coating.
出处
《材料保护》
CAS
CSCD
北大核心
2002年第12期10-12,共3页
Materials Protection
