摘要介绍了氧化钒热致变色薄膜的研究进展 ,对其制备、特性。The article introduces the development of VO 2 films in recent years,focusing on the preparation,characteristics,theory study and applications.
6Ganhua Fu, Angelika P, Niklas V, et al. Annealing effects on VO2 thin films deposited by reactive sputtering [J]. Thin Solid Films, 2006, 515: 2519-2522.
7Wang X J, Li H D, Fei Y J. XRD and Raman study of vanadium oxide thin film deposited on fused silica substrates by RF magnetron sputtering [J]. Appl Surf Sci, 2001, 177: 8-14.
8Frederic G, Laurent S, Optimized infrared switching properties in thermochromic vanadium dioxide thin films: role of deposition process and microstructure [J]. Thin Solid Films 2004, 446: 287-291.
9Jang W L, Su R M, Han N C, et al. Effect of O2 concentration on metal-insulator transition properties of vanadium oxide thin films prepared by radio frequency magnetron sputtering [J]. Thin Solid Films 2007, 515: 7740-7743.
10Bonex W M, Elias S H, Malik M. First synthesis of vanadium dioxide by ultrasonic nebula-spray pyrolysis [J]. Opt Mater, 2007, 29:481-487.