超硬非晶碳薄膜用作红外增透膜的研究

Study on Super-hard Amorphous Carbon upon Silicon as Antireflective and Protective Film

用激光烧蚀石墨靶方法在单晶硅衬底表面沉积了不同厚度的非晶碳膜。对膜进行了表面形貌观察、显微硬度测试 ,测试并分析了膜的Raman光谱和傅立叶变换红外光谱。发现膜含微晶石墨杂质较少 ,具有硬度高、化学惰性等优点 ,适应于制作硅衬底上波长低于

Several amorphic carbon films with different thickness were deposited on singlecrystal silicon by means of pulse laser ablating graphet target.Morphology was observed with SEM.Micro hardness was mearsured.Raman spectra and FTIR spectra were analysised.it is found that these films had little of graphet micro crystaline in their matrix,were very hard and chemical inert,and were suit for transmittance increasing film on silicon in range of wavelength short than 8μm?