溅射效应对离子注入聚合物表面形貌的影响

THE INFLUENCE OF SPUTTERING EFFECTS ON THE SURFACE MORPHOLOGY FOR C, Si AND Cu IMPLANTED PET

采用 MEVVA离子注入机引出的离子进行了聚酯薄膜改性研究 ,考虑到注入离子对表面溅射的强弱与离子的质量密切相关 ,所以选用质量大小不等的 3种离子 Cu,Si和 C为注入离子 ,注入后的聚酯膜表面结构发生了很大的变化 ,用原子力显微镜观察了注入样品表面形貌的变化 ,表面粗糙度与注入离子质量密切相关 .实验结果表明 ,注入前聚酯薄膜表面粗糙 ,表面突起密集地分布在表面 ,其高度可达 2 0～ 2 5 nm,C和 Si注入后表面突起高度下降到 5 nm,随注入离子质量的增加 ,在注入层粗糙度增加 ,Cu注入后在表面形成了弥散分布 Cu原子的析出纳米颗粒 . Cu颗粒起伏高度可达到 5 0 nm.这些变化对聚酯薄膜表面物理化学特性有着重要的影响 .

The surface morphology is observed by atomic force microscope (AFM). The surface morphology of polyethylene terephthalane (PET) is modified with C, Si and Cu ion implantation. The surface morphology change is related closely to ion sputtering coefficients. Before implantation, the large islands with a size of 0. 05-0. 2 μm are densely distributed on PET surface. After C and Si implantation, the surface is smooth. When Cu ions are implanted to a dose ranging from 5×10 15 cm -2 to 1×10 17 cm -2, the surface is also smooth. But when Cu is implanted to a dose of 2×10 17 cm -2, the surface is rough compared with unimplanted PET. Therefore the surface wear resistance is improved extremely. The resistivity of Cu implanted PET decreases with increasing Cu ion dose. Finally the modification mechanism of implanted PET is discussed.