摘要
介绍飞秒激光烧蚀材料的机理及理论模型,阐述飞秒激光烧蚀的特性,揭示飞秒激光烧蚀的广泛应用前景.
The mechanism and the theoretical model of femtosecond laser ablation of materials are introduced, the properties of femtosecond laser ablation are explained, and the widespread application prospect is described.
出处
《激光与光电子学进展》
CSCD
2002年第12期4-9,共6页
Laser & Optoelectronics Progress
关键词
飞秒激光
烧蚀
微细加工
材料迁移
阈值
micromachining,femtosecond laser ablation, material, removal
