准分子激光光束时空积分法能量均匀化的研究

The research of the excimer laser energy uniformity by the method of mesh integrator

准分子激光在微机械加工、医学、光通讯中具有重要应用。但由于准分子激光固有的特性,其光束能量具有不均匀性,从而准分子激光的应用受到极大制约。本文介绍了一种时空积分均束器系统的设计,并在计算机上模拟分析,得到激光输出光斑(靶面)的中心的能量与边缘的能量相差小于1%的均匀性效果。

The excimer laser has important applications in micro-machine process, medicine and optical communication. But because of the intrinsic property of the excimer laser, the beam energy has asymmetry, so there are some limits in applications of excimer laser. This paper describes a optical system for Excimer laser beam uniformity by mesh integrator, analyzed and calculated on the computer, the deviation of energy distribution between the center of the beam profile and the margin is little than 1%.