用于微振动测量的微型迈克尔逊干涉仪的构建

The Construction of Microstructure Michelsons Interferometer for Micro-vibration Measurement

该文介绍了一种用半导体激光器构建微型迈克尔逊干涉仪的方法。这种方法能应用于微振动的精确测量。实验证明 ,用这种方法构建的微振动传感器体积小、质量轻、价格便宜 ,并且具有很高的灵敏度和准确度。

A method to construct the microstructure Michelsons interferometer with semiconductor laser is introduced in this paper.This method can be used in micro vibration measurement of high quality. Experiments have proved that the micro vibration sensor constructed by this new method has many advantages of small volume, low weight, low cost, high sensitivity and high accuracy.