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PLCT薄膜的结晶性能研究

Study of Crystal Properties of PLCT Thin Solid Film
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摘要 采用Sol-Gel法制备了(Pb_0.9-xLa_0.1Ca_x)Ti_0.975O_3(简写为PLCT100x)铁电薄膜.利用SiemensD5005型号X射线衍射仪分析了PLCT(x)薄膜的结晶特性,总结出全钙钛矿相的PLCT铁电薄膜的退火工艺.用AFM测试了PLCT(100x)薄膜的表面,发现用Sol-Gel方法制备的薄膜相当平整. The (Pb0.9-xLa0.1Cax)Ti0.975O3(PLCT100x) thin solid films were prepared by Sol-Gel technique. The crystal property of PLCT thin film were analyzed by a D5005 X - ray of diffractor, the annealed technique of whole perovskite phase of PLCT thin films were confirmed. The surface of thin films were analyzed by AFM, which showed that the film was very smooth and continuous.
出处 《哈尔滨理工大学学报》 CAS 2002年第6期37-38,共2页 Journal of Harbin University of Science and Technology
基金 国家自然科学基金资助(10175045)
关键词 结晶性能 PLCT 铁电薄膜 SOL-GEL XRD AFM X射线衍射仪 制备 PLCT ferroelectric thin film Sol-Gel XRD AFM
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参考文献3

  • 1[1]YOON Y S, JUNG H J. Optical and Electrical Properties of the PLCT Films with Various Compositions Deposited by Sol-Gel Process[J]. J.Sol-gcl Sci.& Tech., 1999, (16): 29-35.
  • 2[2]ZHOU Q E, CHAN H L W, CHOY C L. Structural and Optical Characterization of PLT Thin Films Prepared by a Sol-Gel Process Appl[J]. Phys. A, 2000,(70): 293-296.
  • 3[3]FU X R, LI J H, SONG Z T. Preparation of Highly(100)-oriented PLCT Thin Films on Pt/Ti/SiO2/Si Substratcs by a Simple Sol-Gel Process[J]. Mater. Lett., 2000, 44:70.

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