Ta_2O5/MnO_2复合湿敏薄膜制备工艺研究

Study of the Preparation of Ta_2O_5/MnO_2 Combined Films for Humidity Sensitivity

采用钽片阳极氧化和硝酸锰热分解方法,制备Ta_2O_5/MnO_2复合薄膜,研究了电解液种 类、浓度(质量分数)、电压对Ta_2O_5/MnO_2复合薄膜绝缘性能的影响.

The film of Ta2O5 was prepared by anodic oxidation and the film of MnO2 was infiltrated by heating decomposition on the Ta2O5. The effect of the kinds of electrolyte, concentration and forming voltage on the insulation property of the Ta2O5/MnO2 was studied.