电场辅助阳极连接碱金属耗尽层模型

Model for alkali depletion-layer growth during electric field assisted anodic bonding

假设电场辅助阳极连接中玻璃的碱金属离子耗尽层内负电荷为均匀分布 ,建立了耗尽层生长模型 ,同时计算了耗尽层内电场强度分布以及金属阳极与玻璃之间的静电引力。结果表明 :碱金属离子耗尽层厚度以连接时间的双曲正切函数形式增长 ;界面电场强度随连接时间单调上升 ,而耗尽层外的玻璃内电场强度单调下降 ;电场辅助阳极连接是否完成决定于待连接表面间是否形成紧密接触 ,而非电荷迁移量是否达到某一恒定值。与实验数据的比较表明 ,该模型是合理的。

Based on the assumption of uniformly distributed negative charges in the alkali depletion layer of glass during the electric field assisted anodic bonding process, a theoretical model for the growth of the alkali depletion layer was proposed and the law controlling the growth of the depletion layer was deduced, and the electric field distribution in the depletion layer and electrostatic attraction between surfaces of metal anode and glass were calculated.The results show that the depletion layer grows in the form of hyperbolic tangent function of time, the electric field strength at the interface increases with bonding time to its maximum and the field strength in the bulk glass decreases, and that the fulfillment of the anodic bonding is determined by the completion of intimate contact rather than the charge transfer. Comparison between the results and experimental data indicates that the model is reasonable.