3Cr2W8V钢的钽、碳离子束材料改性

Ta,C Ion Beam Materials Modiffication of Steel 3Cr2W8V

采用由金属蒸汽真空弧离子源引出的强束流钽、碳离子对 3Cr2W8V钢进行离子注入表面改性研究。钽注入剂量为 3× 10 1 7cm- 2 ,引出电压为 42kV ,平均束流密度为 40 μA·cm- 2 。摩擦磨损试验结果表明 ,钽、碳离子双注入 3Cr2W8V钢能使其耐磨性提高 2 5倍 ,并可大幅度降低其摩擦系数。利用卢瑟福背散射谱 (RBS)测量了离子注入表面的成分 ,借助X射线衍射 (XRD)仪考察了表层的相结构。

Ta,C ions extracted from a metal vapor vacuum arc (MEVVA) ion source were implanted into 3Cr2W8V steel, with an implantation dose of 3×10 17 cm -2 , an extraction acceleration 42kV, and an average ion beam flux about 40μA5cm+{-2}. Rutherford backscattering spectrum was used to measure the surface composition after ion implantation. Observation of surface microstructure was carried out by X-ray diffraction analysis. Wear experimental results have showed that the wear rate of the implanted layer dropped 30% for Ta implantation and by a factor of 2.5 for Ta+C dual implantation. In addition, the Ta+C dual implantation was found to significantly reduce the friction coefficient of steel 3Cr2W8V. The wear mechanisms of the implanted layer were discussed by results of RBS and XRD.