摘要
给出基于硅的微机械光开关的设计分析。优化设计了光开关结构 ,提出了一种降低扭臂式结构光开关驱动电压的方法。并根据不同结构 ,给出了静电驱动等方面的分析结果。
This paper reports optimization and design of a MOEMS optical switch based on silicon. The structure of the optical switch is optimized. The method presented can reduce the drive voltage of torsion beam switch. Finally we give analytical results of electrostatic drive based on different structures.
出处
《光电子技术》
CAS
2002年第4期223-227,共5页
Optoelectronic Technology
基金
吉林省科技发展计划资助项目 (No.2 0 0 1 0 3 1 9)
